Properties of NdBa2Cu3O7−δ thin film prepared by off-axis rf sputtering

25 March 1996

journal article
research article
Published by AIP Publishing in Applied Physics Letters

Vol. 68 (13) , 1859-1861
https://doi.org/10.1063/1.116037

Abstract

Thin films of NdBa₂Cu₃O_7−δ(NdBCO) were fabricated on SrTiO₃ substrates by an off‐axis rf sputtering. Disk shaped targets of 5 cm in diameter were prepared with stoichiometric composition of NdBCO by sintering at 1273 K in air. The sintered body was single phase and exhibited T_c(R=0)=92 K. The effects of several deposition parameters on the superconducting NdBCO thin films, e.g., gas pressure, substrate temperature, oxygen annealing process, and rf power were studied. The x‐ray diffraction pattern showed the deposited thin films were highly c‐axis oriented without any impurity phase. Thin films with T_c(R=0)=87 K could be obtained reproducibly at optimized conditions. Critical current density (J_c) of the patterned thin film was 10⁶–10⁷ A/cm² at low temperature.

Keywords

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