Ar+ laser crystallization of a-Si:H film for active layer of TFT
- 1 December 1989
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 115 (1-3) , 78-80
- https://doi.org/10.1016/0022-3093(89)90366-9
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Drift-mobility measurements in amorphous semiconductors using traveling-wave methodPhysical Review B, 1983