Summary Abstract: Thermomechanical properties of glow discharge deposited silicon and silicon oxide films
- 1 May 1988
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 6 (3) , 1696-1698
- https://doi.org/10.1116/1.575314
Abstract
No abstract availableThis publication has 0 references indexed in Scilit: