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Concentration and Behavior of Carbon in Semiconductor Silicon
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Concentration and Behavior of Carbon in Semiconductor Silicon
Concentration and Behavior of Carbon in Semiconductor Silicon
TN
Tadashi Nozaki
Tadashi Nozaki
YY
Yoshifumi Yatsurugi
Yoshifumi Yatsurugi
NA
Nobuyuki Akiyama
Nobuyuki Akiyama
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1 January 1970
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 117
(12)
,
1566
https://doi.org/10.1149/1.2407385
Abstract
No abstract available
Keywords
CONCENTRATION AND BEHAVIOR
BEHAVIOR OF CARBON
CARBON IN SEMICONDUCTOR SILICON
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Cited by 128 articles
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