Quantitative analysis of He in solids by sputtered neutral mass spectrometry

• 1 July 1987
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 5  (4) , 1194-1197
• https://doi.org/10.1116/1.574638

Abstract

Keywords

• QUANTITATIVE ANALYSIS
• SPUTTERED NEUTRAL
• NEUTRAL MASS SPECTROMETRY
• SOLIDS BY SPUTTERED