Metallic Impurity Gettering in MeV Implanted Si

• 1 July 1997
• journal article
• Published by Trans Tech Publications, Ltd. in Solid State Phenomena
• Vol. 57-58, 69-74
• https://doi.org/10.4028/www.scientific.net/ssp.57-58.69

Abstract

Keywords

• GETTERING
• METALLIC IMPURITY
• MEV ION IMPLANTATION
• SILICON
• SIMS