Residual Chlorine in O[sub 2]:HCl Grown SiO[sub 2]

• 1 January 1973
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 120  (2) , 308
• https://doi.org/10.1149/1.2403443

Abstract

Keywords

• RESIDUAL CHLORINE
• SUB
• HCL GROWN SIO