Plasma Electron Beam Source and its Application for Vacuum Metallurgy

• 1 January 1974
• journal article
• Published by The Vacuum Society of Japan in SHINKU
• Vol. 17  (12) , 423-437
• https://doi.org/10.3131/jvsj.17.423

Abstract

Keywords

• VACUUM METALLURGY
• BEAM SOURCE
• PLASMA ELECTRON BEAM