Experimental studies on primary and secondary pyroelectric effects in Pb(ZrxTi1−x)O3, PbTiO3, and ZnO thin films
- 15 November 1991
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 70 (10) , 5538-5543
- https://doi.org/10.1063/1.350212
Abstract
The pyroelectric coefficients and pyroelectric response in lead zirconate titanate (Pb(ZrxTi1−x)O3), lead titanate (PbTiO3), and zinc oxide (ZnO) thin films (0.1–2.0‐μm thick) have been studied for possible integrated thermosensor applications. Pyroelectric properties of these films deposited on thick (500‐μm) silicon substrates and thin (1.0‐μm) polysilicon membranes have been investigated. The measured pyroelectric coefficients for these materials are 70, 95, and 1.0 nC/cm2 K for Pb(Zr0.54Ti0.46)O3, PbTiO3, and ZnO, respectively. Coupling effects between the pyroelectric film and substrate were studied. It was observed that the primary pyroelectric effect dominates the pyroelectric response in Pb(Zr0.54Ti0.46)O3 and PbTiO3 thin films while the secondary effect is dominant in ZnO thin films.This publication has 4 references indexed in Scilit:
- Ferroelectric materials for thermal ir sensors state-of-the-art and perspectivesFerroelectrics, 1990
- Effects of the substrate on the response of pyroelectric detectorsIEEE Transactions on Electron Devices, 1980
- Pyroelectric detectors and materialsProceedings of the IEEE, 1978
- Pyroelectric Coefficient Direct Measurement Technique and Application to a Nsec Response Time DetectorIEEE Transactions on Sonics and Ultrasonics, 1972