Growth of regularly coiled spring-like fibers of Si3N4 by iron impurity-activated chemical vapor deposition
- 13 March 1989
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 54 (11) , 1001-1003
- https://doi.org/10.1063/1.101422
Abstract
Very regularly coiled spring‐like fibers of Si3N4 have been obtained from a gas mixture of Si2Cl6, NH3, and H2 at 1200 °C on a graphite substrate on which an iron impurity was painted. The spring‐like fibers were amorphous Si3N4 with a circular cross section having a 0.5–1 μm thickness, 3–5 μm coil pitch, 10–15 μm coil diameter, and 50–100 μm coil length. The height of the bush of the fibers reached 1.5–2 mm after 30 min reaction time.Keywords
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