Waveguide excimer laser fabrication of 3D microstructures

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Abstract
Waveguide excimer lasers in combination with high-resolution imaging and precision motion control systems are capable of direct-write shaping of many polymers, ceramics, glasses, and metal films. Three-dimensional structures can be produced by scanning the worksurface under the focused beam and varying the energy delivered to the worksurface through use of various exposure algorithms. Using this technique, we have produced 3-D structures in polyimide and diamond that demonstrate high spatial resolution and good surface finish.

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