Passivation of GaAs surface by sulfur glow discharge

• 2 September 1996
• journal article
• Published by AIP Publishing in Applied Physics Letters
• Vol. 69  (10) , 1429-1431
• https://doi.org/10.1063/1.117604

Abstract

Keywords

• GALLIUM ARSENIDES
• PASSIVATION
• SURFACE TREATMENTS
• GLOW DISCHARGES
• PHOTOELECTRON SPECTROSCOPY
• AES
• CHEMICAL COMPOSITION
• PHOTOLUMINESCENCE