Deposition of carbon nitride via hot filament assisted CVD and pulsed laser deposition
- 1 December 1997
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 6 (12) , 1799-1805
- https://doi.org/10.1016/s0925-9635(97)00142-8
Abstract
No abstract availableKeywords
This publication has 13 references indexed in Scilit:
- Crystalline carbon nitride films formation by chemical vapor depositionApplied Physics Letters, 1996
- Growth and characterization of carbon nitride thin films prepared by arc-plasma jet chemical vapor depositionApplied Physics Letters, 1995
- Optical measurement of the elastic moduli and thermal diffusivity of a C–N filmJournal of Materials Research, 1995
- Carbon Nitride Deposited Using Energetic Species: A Two-Phase SystemPhysical Review Letters, 1994
- Observation of crystallinePhysical Review B, 1994
- Experimental Realization of the Covalent Solid Carbon NitrideScience, 1993
- Nano-indentation studies of ultrahigh strength carbon nitride thin filmsJournal of Applied Physics, 1993
- Structure and bonding studies of the C:N thin films produced by rf sputtering methodJournal of Materials Research, 1990
- Structural properties and electronic structure of low-compressibility materials: β- and hypothetical β-Physical Review B, 1990
- Prediction of New Low Compressibility SolidsScience, 1989