A combined high-resolution electron microscopy, x-ray photoemission spectroscopy, and electrical properties study of the InP–SiO2 interface
- 1 July 1985
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B
- Vol. 3 (4) , 1081-1086
- https://doi.org/10.1116/1.583056
Abstract
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