Integrated Systems [systems on a chip]
- 1 January 1996
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 43 (10) , 1678-1687
- https://doi.org/10.1109/16.536814
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- A scaling scheme for interconnect in deep-submicron processesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Statistical metrology: At the root of manufacturing controlJournal of Vacuum Science & Technology B, 1994
- Micromechanical VelcroJournal of Microelectromechanical Systems, 1992