A micromachined vibrating gyroscope
- 24 August 2005
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- A micromachined comb-drive tuning fork rate gyroscopePublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Electrostatic parallelogram actuatorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Silicon monolithic micromechanical gyroscopePublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Piezoelectric vibratory gyroscope using flexural vibration of a triangular barPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002