A digital hygrometer using a polyimide film relative humidity sensor
Open Access
- 1 April 1996
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Instrumentation and Measurement
- Vol. 45 (2) , 564-569
- https://doi.org/10.1109/19.492788
Abstract
A digital hygrometer using a relative humidity sensor is developed. The sensor consists of a polyimide film spin-coated onto an Si substrate. The sensor model for signal processing, which describes the sensor capacitance in terms of relative humidity and temperature in closed form, is derived first. The interface appropriate for the sensor model, based on a relaxation oscillator, is designed next. Finally, a prototype hygrometer built using a one-chip microprocessor and its performance are described to demonstrate the validity of the sensor model and interface.Keywords
This publication has 11 references indexed in Scilit:
- A thin film polyimide based capacitive type relative humidity sensorSensors and Actuators B: Chemical, 1993
- A solid-state relative humidity measurement systemIEEE Transactions on Instrumentation and Measurement, 1990
- A digital hygrometerIEEE Transactions on Instrumentation and Measurement, 1988
- A polyimide-based capacitive humidity sensorIEEE Transactions on Electron Devices, 1985
- Moisture diffusion in poltimide films in integrated circuitsJournal of Electronic Materials, 1985
- Digital hygrometer with capacitive sensorJournal of Physics E: Scientific Instruments, 1983
- Flat-based water vapour sensor of the phosphorus pentoxide typeJournal of Physics E: Scientific Instruments, 1980
- Ceramic Humidity SensorsIEEE Transactions on Components, Hybrids, and Manufacturing Technology, 1980
- A Capacitance Humidity-Sensing TransducerIEEE Transactions on Components, Hybrids, and Manufacturing Technology, 1979
- Ionic conductivity of Li5AlO4 and Li5GaO4 in moist air environments: Potential humidity sensorsMaterials Research Bulletin, 1979