MESFET lift-off from GaAs substrate to glass host

Abstract
We report for the first time on epitaxially grown fully processed MESFETs lifted off from the GaAs substrate and deposited on glass as a new host material. The layer thickness of the epitaxial film was 0.5 μm. Very good device performance was obtained with gm values of 155mS/mm. This opens interesting possibilities for hybrid or monolithic integration of III-V technology with other materials technologies.