Advanced Materials Processing by Adsorption Control

• 1 January 1997
• journal article
• Published by Springer Nature in Interface Science
• Vol. 5  (2/3) , 119-128
• https://doi.org/10.1023/a:1008601024870

Abstract

Keywords

• ATOMIC LAYER LEVEL
• GAS-SOLID REACTIONS
• ATOMIC LAYER EPITAXY ALE
• SATURATION
• HIGH SURFACE AREA MATERIALS
• CATALYST PREPARATION
• CHEMISORPTION
• SURFACE AREA
• SURFACE STRUCTURE
• ATOMIC LAYER EPITAXY