Porous Silicon Oxide Anti‐Reflection Coating for Solar Cells
- 1 March 1982
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 129 (3) , 596-599
- https://doi.org/10.1149/1.2123931
Abstract
A very useful anti‐reflection (AR) coating, having characteristics quite similar to silicon monoxide, has been grown on P+N solar cells by a simple technique. ESCA, infrared absorption, and ellipsometry analysis of the films indicated that they consist of silicon oxide with some bound hydrogen. Some added advantages of the new AR coating are described.Keywords
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