Thin Film Thermometer for Cryogenic Temperature
- 1 January 1987
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 26 (S3-2)
- https://doi.org/10.7567/jjaps.26s3.1743
Abstract
A new type of cryogenic thermometer using sputtered zirconium nitride film has been developed. The sensor was integrated on a sapphire substrate by reactive sputtering equipment, and its sensing area was only 1 mm long and 2 mm wide. The thin film sensor has wide sensitive region from 300 to 2 K, or even lower and fast response time to detect second sound in superfluid helium. Magnetic field dependence of the sensor is small. Under the magnetic field of 6 T, the magnetoresistance was smaller by two orders of magnitude than that of carbon-glass resistance thermometer at 4.2 K. The effect of the longitudinal magnetic field of 6 T to temperature is less than 5 mK.Keywords
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