An Examination of the Product Catalyzed Reaction of Trimethylgallium with Phosphine and the Mechanism of the Chemical Vapor Deposition of Gallium Phosphide and Gallium Arsenide

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Abstract
The formation of via reaction of with was examined. The reaction follows a Langmuir‐Hinshelwood mechanism (adsorption of both reagents prior to reaction). The surface was also found to catalyze the unimolecular decomposition of and . These results and similar ones for the reaction of with are discussed.