ROLES OF CAVITATION AND ACOUSTIC STREAMING IN MEGASONIC CLEANING
- 1 July 1999
- journal article
- research article
- Published by Taylor & Francis in Particulate Science and Technology
- Vol. 17 (3) , 229-238
- https://doi.org/10.1080/02726359908906815
Abstract
Despite wide use of megasonics in the semiconductor industry, the physics of megasonic particle removal remains largely unexplained. Mechanisms of particle removal in sonic baths are discussed, including the effects of operating parameters such as frequency, temperature, and power density. Experimental results are related to the theory, showing both cavitation and acoustic streaming as important components of the megasonic process.Keywords
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