Self annealing of ion implanted silicon: suggestion for an experiment
- 1 January 1980
- journal article
- Published by Taylor & Francis in Radiation Effects
- Vol. 50 (3-6) , 115-118
- https://doi.org/10.1080/01422448008218665
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Dynamics of laser annealingAIP Conference Proceedings, 1979
- Laser surface melting and subsequent solidificationAIP Conference Proceedings, 1979
- Thermal conductivity variation of silicon with temperatureMicroelectronics Reliability, 1978