Chemical Mechanisms in Photoresist Systems: Part III . Crosslinking and Reciprocity Failure in Bisazide Resist
- 1 February 1979
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 126 (2) , 273-277
- https://doi.org/10.1149/1.2129020
Abstract
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