Polyladder organo siloxane bi-level resist.

• 1 January 1989
• journal article
• Published by Technical Association of Photopolymers, Japan in Journal of Photopolymer Science and Technology
• Vol. 2  (1) , 103-108
• https://doi.org/10.2494/photopolymer.2.103

Abstract

Keywords

• LEVEL RESIST
• POLYLADDER ORGANO
• ORGANO SILOXANE
• SILOXANE BI
• BI LEVEL