An Ellipsometer Investigation of Vapor Adsorption on Etched Silicon

• 1 January 1964
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 111  (6) , 646
• https://doi.org/10.1149/1.2426203

Abstract

Keywords

• ELLIPSOMETER INVESTIGATION
• VAPOR ADSORPTION
• ETCHED SILICON
• INVESTIGATION OF VAPOR
• ADSORPTION ON ETCHED