Cross-Sectional Transmission Electron Microscopy of Defects in Beta Silicon Carbide Thin Films
- 1 January 1985
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Epitaxial Growth and Characterization of β ‐ SiC Thin FilmsJournal of the Electrochemical Society, 1985
- Thermal Stresses in Heteroepitaxial Beta Silicon Carbide Thin Films Grown on Silicon SubstratesJournal of the Electrochemical Society, 1984