Experimental determination of band offset energies between Zr silicate alloy dielectrics and crystalline Si substrates by XAS, XPS and AES and ab initio theory: a new approach to the compositional dependence of direct tunneling currents
- 26 June 2003
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Electronic structure of high-k transition metal oxides and their silicate and aluminate alloysJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2002
- Electronic structure of noncrystalline transition metal silicate and aluminate alloysApplied Physics Letters, 2001
- High-κ gate dielectrics: Current status and materials properties considerationsJournal of Applied Physics, 2001
- CALCULATED AND MEASURED AUGER LINESHAPES IN SiO2Published by Elsevier ,1978