Preparation of Photosensitive Al2O3 Gel Films and Their Application to Fine-Patterning.
- 1 January 1996
- journal article
- Published by Society of Polymer Science, Japan in KOBUNSHI RONBUNSHU
- Vol. 53 (4) , 253-259
- https://doi.org/10.1295/koron.53.253
Abstract
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