Electrostatic analysis of backscattered heavy ions for semiconductor surface investigation
- 1 January 1981
- journal article
- Published by EDP Sciences in Revue de Physique Appliquée
- Vol. 16 (4) , 165-172
- https://doi.org/10.1051/rphysap:01981001604016500
Abstract
The capabilities of Rutherford backscattering in surface analysis are limited by the energy resolution of the solid state detectors and their rapid degradation for heavier projectiles. Here, we investigate the possibilities of an electrostatic analyser (ESA) detecting heavy projectiles (7Li+, 12C +) backscattered from various compound semiconductor surfaces, essentially with respect to mass and depth resolutionKeywords
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