New I-Line Lenses
- 25 July 1989
- conference paper
- Published by SPIE-Intl Soc Optical Eng
- Vol. 1088, 187-193
- https://doi.org/10.1117/12.953146
Abstract
As the semiconductor industry presses toward smaller and smaller feature sizes, new lenses with higher numerical apertures are being introduced. As more chipmakers purchase i-line steppers, the resist makers have developed new resists to exploit them. This paper will show experimental results from two new lenses offered by GCA using new, as well as established, i-line resists.© (1989) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.Keywords
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