Pulsed field emission electron or ion gun with energy filter

• 31 December 1987
• journal article
• Published by Elsevier in Microelectronic Engineering
• Vol. 6  (1-4) , 105-110
• https://doi.org/10.1016/0167-9317(87)90023-2

Abstract

Keywords

• ION GUN
• ENERGY FILTER
• PULSED FIELD EMISSION ELECTRON
• FIELD EMISSION