Preparation of TiC and TiC/DLC Multilayers by Metal Plasma Immersion Ion Implantation and Deposition: Relationship between Composition, Microstructure and Wear Properties
- 1 January 1996
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Structure and composition of hydrogenated TixCy thin films prepared by reactive sputteringJournal of Vacuum Science & Technology A, 1995
- Tin, Tic and Ti(C, N) film characterization and its relationship to tribological behaviourSurface and Interface Analysis, 1992
- Properties and performance of plasma-assisted physically vapor-deposited TiC coatingsMaterials Science and Engineering: A, 1991