Tetragonal Strain in MBE Ge_xSi_1-x Films Grown on (100) Si Observed by Ion Channeling and X-Ray Diffraction

Publisher Website

1 January 1983

journal article
Published by Springer Nature in MRS Proceedings

Vol. 25
https://doi.org/10.1557/proc-25-497

Abstract

No abstract available

Keywords

This publication has 2 references indexed in Scilit:

Elastic strain and misfit dislocation density in Si0.92Ge0.08 films on silicon substrates
Thin Solid Films, 1977
A one-dimensional SiGe superlattice grown by UHV epitaxy
Applied Physics A, 1975