Automatic deposition of multilayer X-ray coatings with laterally graded d-spacing
- 6 August 1985
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
Abstract
A computer controlled e-beam evaporation system is described, which allows fully automated production of soft X-ray reflection coatings with laterally graded d-spacing. Thickness control is done by measurement of the soft X-ray reflection coefficient on a reference substrate during deposition. Graded thickness is obtained by computer controlled movement of shutters. A result is given for automatic deposition of a multilayer coating.Keywords
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