Micro-opto-mechanical 2×2 switch for single-mode fibers based on plasma-etched silicon mirror and electrostatic actuation
- 1 January 1999
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Lightwave Technology
- Vol. 17 (1) , 2-6
- https://doi.org/10.1109/50.737413
Abstract
No abstract availableKeywords
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