An automatic focusing and astigmatism correction system for the SEM and CTEM
- 2 August 1982
- journal article
- Published by Wiley in Journal of Microscopy
- Vol. 127 (2) , 185-199
- https://doi.org/10.1111/j.1365-2818.1982.tb00412.x
Abstract
SUMMARY: Focusing and correcting the astigmatism of an electron microscope can be time consuming and difficult to achieve accurately. An automatic method of performing these tasks using an on‐line computer system and a digital framestore has been developed. The method is applicable to noisy images in both scanning and conventional transmission electron microscopes. It is capable of setting focus and correcting astigmatism at least as accurately as can be achieved by an experienced operator.Keywords
This publication has 9 references indexed in Scilit:
- On‐line computation of diffractograms for the analysis of SEM imagesScanning, 1980
- An automatic focusing and stigmating system for the SEMJournal of Physics E: Scientific Instruments, 1979
- Accurate stigmating of a high voltage electron microscopeJournal of Microscopy, 1977
- Controlled focusing and stigmating in the conventional and scanning transmission electron microscopeJournal of Physics E: Scientific Instruments, 1975
- Signal-to-noise ratio of electron micrographs obtained by cross correlationNature, 1975
- A digital computer method for revealing directional information in images (in electron microscopy)Journal of Physics E: Scientific Instruments, 1975
- Light Optical Convolution Computers in Electron MicroscopyZeitschrift für Naturforschung A, 1974
- Automatic Focus Control of Charged-Particle BeamsIBM Journal of Research and Development, 1968
- The Theoretical Resolution Limit of the Electron MicroscopeJournal of Applied Physics, 1949