Study of Tin Diffusion into Silicon by Backscattering Analysis

• 1 October 1974
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 13  (10) , 1533-1540
• https://doi.org/10.1143/jjap.13.1533

Abstract

Keywords

• BACKSCATTERING ANALYSIS
• TIN DIFFUSION
• STUDY OF TIN
• SILICON BY BACKSCATTERING
• DIFFUSION INTO SILICON