Gas Phase Etching of Sapphire with Sulfur Fluorides

• 1 January 1967
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 114  (2) , 204
• https://doi.org/10.1149/1.2426539

Abstract

Keywords

• SULFUR FLUORIDES
• GAS PHASE
• PHASE ETCHING
• ETCHING OF SAPPHIRE