Parallel signal injection in a CCD using an integrated optical channel waveguide array

1 February 1978

journal article
Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices

Vol. 25 (2) , 267-269
https://doi.org/10.1109/T-ED.1978.19068

Abstract

Parallel signal injection into CCD's by means of an integrated optical channel waveguide array is demonstrated. A device in which 20 channel waveguides are coupled to a 4-phase CCD having two-level polysilicon electrodes is successfully operated. CCD transfer inefficiency is 1.0 × 10-4. Experimental results illustrating array uniformity are presented.

Keywords

OPTICAL WAVEGUIDES
OPTICAL IMAGING
SILICON
IMAGE SENSORS

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