A multichannel time-dispersion voltage contrast detector

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Abstract
This paper analyzes the feasibility of using a new type of voltage contrast detector. Voltage contrast measurements are made by recording transit times of secondary electrons as they are emitted from a specimen and collected above the final lens of a scanning electron microscope. The study shows that such a voltage contrast detector can be designed to combine a high spatial resolution with a large field of view: a spot radius of less than 0.15 μm can be maintained over a 6×6 mm2 region. The detector also requires 16–20 times less electrons to attain the same voltage resolution performance as conventional retarding‐field‐type voltage contrast detectors. The new detector is thus expected to speed up current data acquisition times by a factor of 16–20.

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