Production of Fine Ceramic Powders from Chloromethylsilanes Using Pulsed Excimer Radiation
- 1 July 1989
- journal article
- Published by Wiley in Journal of the American Ceramic Society
- Vol. 72 (7) , 1130-1135
- https://doi.org/10.1111/j.1151-2916.1989.tb09695.x
Abstract
Ceramic powders have been produced by the photodecomposition of chloromethylsilanes using a pulsed excimer laser operating at 193 nm. These feedstocks are cheaper and easier to handle than SiH4, the main feedstock used in earlier work using continuous–wave CO2 lasers as the irradiation source. Powders were produced from photolysis of silanes containing methyl groups without the addition of any coreagents, while the two silanes tested containing only chlorine and hydrogen ligands, SiCI3H and SiCI4, required the addition of H2 as a coreagent for significant yields of powder to be produced. The powders produced were found to be low in chlorine, with amorphous Si powders or β‐SiC being produced depending on feedstock. Particle sizes measured from electron micrographs varied from less than 10 nm to 1.5 μm.Keywords
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