Low Temperature Growth of PZT(52/48) Thin Films using Rf Magnetron Sputtering Method
- 1 January 1996
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Dielectric response of ferroelectric thin films on non-metallic electrodesIntegrated Ferroelectrics, 1992
- Ceramic Thin Films: Fabrication and ApplicationsScience, 1990
- Ferroelectric materials for 64 Mb and 256 Mb DRAMsIEEE Circuits and Devices Magazine, 1990
- Ferroelectric MemoriesScience, 1989