Optical properties of AlN thin films correlated with sputtering conditions
- 1 November 1998
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 333 (1-2) , 251-255
- https://doi.org/10.1016/s0040-6090(98)00816-5
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Optical properties of A1NSolid State Communications, 1995
- Dependence on volume of the phonon frequencies and the ir effective charges of several III-V semiconductorsPhysical Review B, 1983
- Localized Effective Charges in Diatomic CrystalsPhysical Review B, 1971
- Lattice Vibration Spectra of Aluminum NitridePhysical Review B, 1967
- Refraction Index Measurements on AlN Single CrystalsPhysica Status Solidi (b), 1966
- Space charge conduction and electrical behaviour of aluminium nitride single crystalsSolid State Communications, 1965