A highest rate self-sputtering magnetron source

• 1 January 1990
• journal article
• Published by Elsevier in Vacuum
• Vol. 41  (7) , 1968-1970
• https://doi.org/10.1016/0042-207x(90)94147-i

Abstract

Keywords

• HIGHEST RATE
• RATE SELF SPUTTERING
• SPUTTERING MAGNETRON SOURCE