T8-Hydridospherosiloxanes: novel precursors for silicon dioxide thin films. 1. Precursor characterization and preliminary CVD
- 1 November 1993
- journal article
- Published by American Chemical Society (ACS) in Chemistry of Materials
- Vol. 5 (11) , 1636-1640
- https://doi.org/10.1021/cm00035a009
Abstract
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