Cross section for removing chemisorbed oxygen from an aluminum target by sputtering
- 1 March 2002
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 20 (2) , 521-525
- https://doi.org/10.1116/1.1451254
Abstract
By chemisorption of oxygen on an aluminum target, an absolute target voltage increase is noticed which can be attributed to the reduction of the secondary electron emission from the target. By following the target voltage behavior during magnetron sputtering of the aluminum target precovered with a chemisorbed oxygen layer, the cross section for removing the chemisorbed layer could be calculated based on a proposed model that relates the measured target voltage to the target coverage.Keywords
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