Low-Temperature Epitaxial Growth of Single Crystalline Silicon from Silane

• 1 January 1969
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 116  (6) , 872
• https://doi.org/10.1149/1.2412092

Abstract

Keywords

• SINGLE CRYSTALLINE
• LOW TEMPERATURE
• SILANE
• CRYSTALLINE SILICON
• TEMPERATURE EPITAXIAL GROWTH