An all-silicon single-wafer fabrication technology for precision microaccelerometers

This publication has 3 references indexed in Scilit:

• Surface micromachined accelerometers
  IEEE Journal of Solid-State Circuits, 1996
• Mechanical-thermal noise in micromachined acoustic and vibration sensors
  IEEE Transactions on Electron Devices, 1993
• Wide dynamic range direct accelerometer
  Published by Institute of Electrical and Electronics Engineers (IEEE) ,1990